Category Archives: Status

MFF Equipment Status

Instrument Status Status Notes
6″ Sputter deposition  Ready Ready

Issues – Water flow meter is not indicating flow and ion gauge is not believable

8″ Sputter deposition Ready Ready

Issues – None

Denton e-beam deposition  Ready Ready

Issues – None

Fredrick e-beam deposition  Ready Ready

Issues – Needs to be bead blasted and mirror installed to see the beam

20171024 – Water lines replaced after one cracked, New Al crucible

Parylene Coater  Ready Ready

Issues – Needs to be added to e-logger

TRION  Ready Ready

Issues – Reduced O2 flow for clean recipe as the throttle valve and can not control the flow

CAIBE  Unavailable Rebuilding the table rotation stage – Waiting on new airlines

Issues – Need a motor controller for the sample rotation

March  Ready Ready

Issues – None

Ellipsometer  Ready Ready

Issues – None

20171024 – Light source realigned to give a lower gain of 2

FTIR  Ready Ready

Issues – Calibration

Curvature System  Ready Ready

Issues – Calibration

Oxidation Furnace  Ready Ready

Issues – Need to determine if the wet oxidation is working correctly

Fall 2017 – Installed a water bubbler, but the lines are not sending the steam to the furnace correctly.

Diffusion Furnace  Ready Ready

Issues – None

2″ Furnace  Ready Ready

Issues – None

RTP  Useable Chiller is leaking water if run at too higher pressure

Issues – Need to make sure we have the proper cooling

Dicing Saw  Ready Ready
Issues – Need to build an new pump mount and there has been water flow issuesFall 2017 – Moved the water supply off the tape to the building supply
EVG 620 Mask Aligner  Ready Ready – Turning off the lamp to preserve the life time

Issues – Logging sometimes fails as the optics stage gets stuck

Wet bench – Chemical processing  Ready Ready


Vacuum oven  Ready Ready

Issues – Need a pump to be added, have a spare one in for 431 if it is running ok

Hotplates  Ready Ready

Issues – None

Spinner  Ready Ready

Issues – None

Wire bonder  Ready Ready

Issues – None

Cleanroom Optical Microscopy  Ready Ready

Issues – Calibrate the CCD capture measurements, can use the SYP mask

Probe station  Ready Ready

Issues – Need to replace the y-axis belt

Parameter Analyzer  Ready Ready

Issues – See above

Capacitance Voltage Measurement  Ready Ready

Issues – Need to automate

Four point conductivity  Ready Ready

Issues – Need to automate

Atomic Layer Deposition Useable Optimizing the HfO2 deposition

Issues – Lots

Filmertics 3D Profiler Useable No operation without Dr. Kendrick

Issues – Waiting for the 100x objective to come back from being repaired