Category Archives: Status

MFF Equipment Status

Instrument Status Status Notes
6″ Sputter deposition  Ready Ready

Issues – Water flow meter is not indicating flow

8″ Sputter deposition Useable Operational – Turbo needs to be turned on

Issues – Air lines leaking and hoist gets stuck

Denton e-beam deposition  Ready Ready

Issues – Needs to be bead blasted and the crucible selector needs replacing

Fredrick e-beam deposition  Ready Ready

Issues – Needs to be bead blasted and mirror installed to see the beam

Parylene Coater  Ready Ready

Issues – Needs to be added to e-logger

TRION  Ready Ready

Issues – Need to introduce a double button to keep hands safe on closing and the pump oil needs changing to speed up the pump down

CAIBE  Ready Ready

Issues – Need a motor controller for the sample rotation

March  Useable Ready

Issues – Changed the oil to 14/6 and it seems to be running better

Ellipsometer  Ready Ready

Issues – None

FTIR  Ready Ready

Issues – Calibration

Curvature System  Ready Ready

Issues – Calibration

Oxidation Furnace  Ready Ready

Issues – Would prefer to have a wet furnace

Diffusion Furnace  Ready Ready

Issues – None

2″ Furnace  Ready Ready

Issues – Need spare tubes

RTP  Useable Working, but operate with Dr. Kendrick’s assistance

Issues – Need to make sure we have the proper cooling

Dicing Saw  Useable Working, but water is entering the vacuum pump – operate with Dr. Kendrick’s assistance

Issues – Still have water and pump issues

EVG 620 Mask Aligner  Ready Ready

Issues – Logging sometimes fails as the optics stage gets stuck

Wet bench – Chemical processing  Ready Ready

Issues – RCA benches not working in automatic mode

Vacuum oven  Ready Ready

Issues – Need a pump to be added

Hotplates  Ready Ready

Issues – Need surface thermometers for calibration

Spinner  Ready Ready

Issues – None, would like another or for non photoresist coatings

Wire bonder  Ready Ready

Issues – None

Cleanroom Optical Microscopy  Ready Ready

Issues – Calibrate the CCD capture measurements, can use the SYP mask

Probe station  Ready Ready

Issues – Need to replace the y-axis belt

Parameter Analyzer  Ready Ready

Issues – None

Capacitance Voltage Measurement  Ready Ready

Issues – Need to automate

Four point conductivity  Ready Ready

Issues – Get a calibration standard