I got the EDS system working again. I’ll keep an eye on it to make sure it stays on.
One thing that will help is do not acquire data with the chamber camera turned on.
It is okay to use it now.
I got the EDS system working again. I’ll keep an eye on it to make sure it stays on.
One thing that will help is do not acquire data with the chamber camera turned on.
It is okay to use it now.
The vacuum shut off on the FESEM. I’ve restarted it but it will be an hour or more until the vacuum fully recovers
I’m working with Hitachi to get service.
The FESEM is back online this morning. The vacuum has recovered.
This problem – the vacuum panel shutting off – has occurred a few times but it comes back on. It is hard for the service engineer to repair the problem when it comes back and works fine.
So, the scope is online and ready to use.
The vacuum system shut off on the FESEM. I’m getting it back under vacuum but it will take overnight to pump back down properly. Please reschedule.
I’ll send out another message tomorrow about the system status.