3D Optical Profiler

The new 3D profiler (https://www.filmetrics.com/opticalprofilers/profilm3d) has arrived and is installed. The system will allow for measuring the surface profile of samples to extract feature heights and surface roughness. Contact Dr. Kendrick (cekendri@mtu.edu) if you would like to learn more about the system.

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Per spec

object spec

Mech spec

 

 


MFF and SYP

The Microfabrication Core Facility (MFF) was host to 15 students from the Summer Youth Program (SYP) on the 18th of July (and a further more on the 25th of July), aged from 12 – 14 years. The students learned about the fabrication of silicon based devices and how silicon wafers are produced. Additionally, they had hands on experience in the cleanroom and used the photolithography process to transfer a pattern on a photomask to a silicon wafer. The pattern had a scale on it from 100 um (diameter of a human hair) to 1 um (diameter of bacteria) to allow the students to understand the scale that MFF users work at. The students also hand cleaved silicon wafers to produce dies of gold Michigan Technological University (MTU) logos as a keepsake for their time in the MFF.

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The last group of five students gowned up and ready to do the photolithography process.

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Left – The wafers after the photolithography process, Right – Gold MTU logos ready to cleave

If you are interested in what the MFF can do regarding teaching/research/K-12 contact Dr. Chito Kendrick, cekendri@mtu.edu or microfabrication@mtu.edu.

 


Portable Blood-Typing

Portable Blood-Typing research in a lab

Adrienne Minerick, a professor of chemical engineering and associate dean of
the College of Engineering at Michigan Tech, has spun off Microdevice Engineering, Inc.
to market her portable blood-typing technology. Together with Mary Raber,
assistant dean of academic programs in Michigan Tech’s Pavlis Honors College,
Minerick is developing a handheld point-of-care device to type ABO-Rh blood and
hematocrit (blood cell concentration) in five minutes. The device is being engineered
to be as easy to use as a blood glucose meter.

The lab on a chip devices being used by Adrienne Minerick’s cop many are being
fabricated using the Microfabrication Core Facility.



MFF Equipment Status

Instrument Status Status Notes
6″ Sputter deposition  Ready Online

Issues – Water flow meter is not indicating flow and ion gauge is not believable

20180102 – Replaced the outlet water connectors as one had cracked and leaked water on the floor

20180406 – Replaced the pump oil and cleaned both the top and bottom seals on the chamber

8″ Sputter deposition Ready Online

Issues – Need to fix the hoist or take weight off the system

Denton e-beam deposition  Ready Online

Issues – None

20180102 – Cryo Regenerated

Fredrick e-beam deposition  Ready Online

Issues – Needs to be bead blasted, install mirror to see the beam, and check the pump for a leak

20171024 – Water lines replaced after one cracked, New Al crucible

Parylene Coater  Ready Ready

Issues – Needs to be added to e-logger

TRION  Ready Online

Issues – Reduced O2 flow for clean recipe as the throttle valve and can not control the flow, and random pressure issues

20171127 – Replaced the oil after the pump run out, leak in a seal still

CAIBE  Ready Online

20180420 – Installed new stage, fixed the water line that melted, removed the load lock turbo from the cooling as it was blocked and not needed

20180601 – Installed a new microwave source

March  Useable Online

Issues – Cross talk between the tuner and MFC boxes, need to try and have an external PSU

20180127 – Connected water lines to the RF base

Ellipsometer  Ready Ready

Issues – None

20171024 – Light source realigned to give a lower gain of 2

FTIR  Ready Ready

Issues – Calibration

Curvature System  Ready Ready

Issues – Calibration

Oxidation Furnace  Ready Ready

Issues – Need to determine if the wet oxidation is working correctly

Fall 2017 – Installed a water bubbler, but the lines are not sending the steam to the furnace correctly.

20180131 – Installed a new TC for zone 2, testing in the lab class

20180604 – Installed a new controller and the system seems stable

Diffusion Furnace  Ready Ready

Issues – None

2″ Furnace  Ready Ready

Issues – None

RTP  Useable Chiller is leaking water if run at too higher pressure

Issues – Need to make sure we have the proper cooling

Dicing Saw  Useable Issues – Need to build an new pump mount and there has been water flow issues

Fall 2017 – Moved the water supply off the tape to the building supply, replaced a leaking water pressure switch

20180413 – Replaced the pressure flow switch but it is not fast enough or not sending the right signal that there is water in time.

20180601 – Replaced several of the boards after boards 6 and 7 were swapped as recommended by the company and this lead to several issues with burnt out leads and blown fuses

EVG 620 Mask Aligner  Ready Ready – Turning off the lamp to preserve the life time

Issues – Logging sometimes fails as the optics stage gets stuck

Wet bench – Chemical processing  Ready Ready

Issues

Vacuum oven  Ready Ready

Issues – None

20180131 – Installed a vacuum pump

Hotplates  Ready Ready

Issues – None

Spinner  Ready Ready

Issues – None

Wire bonder  Ready Ready

Issues – None

Cleanroom Optical Microscopy  Ready Ready

Issues – Calibrate the CCD capture measurements, can use the SYP mask

Probe station  Ready Ready

Issues – Need to replace the y-axis belt

Parameter Analyzer  Ready Ready

Issues – See above

Capacitance Voltage Measurement  Ready Ready

Issues – Need to automate

Four point conductivity  Ready Ready

Issues – Need to automate

Atomic Layer Deposition Useable Waiting on new heat pads to heat the top and shower head of the ALD to reduce clogging.

Issues – Need to buy a new TDMAH source

201805023 – set up the process to represent an ALD valve that has constant Ar carrier flow

20180601 – Installed Ferrocene iron ALD source

Filmertics 3D Profiler Ready Ready for training and usage

20171127 – 100x received and installed


Northern Nano Lab Alliance Training Grant Program

The National Science Foundation’s National Nano Coordinated Infrastructure Program (http://www.nnci.net/) has set up a network of nodes to support nano-related research and education. Headquartered at the University of Minnesota, the Midwest Infrastructure Corridor (MINIC) is one of those nodes. MINIC has national reach, supporting work in Nano-bio, 2D materials, and other emerging fields. However MINIC also has a responsibility to support and enable other nano and micro fabrication laboratories in the upper Midwest. To accomplish this latter goal MINIC has created the Northern Nano Lab Alliance (NNLA)(http://www.minic.umn.edu/nano-lab-alliance). Currently made up of eight labs, this organization meets regularly to share best practices, and develop new methods to improve lab operation.

MINIC is pleased to announce a new Training Grant Program to members of the Northern Nano Lab Alliance. This program is intended to train researchers and provide low-cost access to tools that are not available at their home labs. This may be used to enable various research projects or to provide participants with desirable skills. The basic rules are laid out as follows:

MINIC will provide program participants tool access at 50% of the current academic rate (http://www.nfc.umn.edu/assets/pdf/access_rates_academic.pdf). This subsidy is limited to $1500 per year per participant. Participants are encouraged to carry out the processing work during a visit to maximize the training experience. Where this is impractical, remote training will be available on a limited set of tools. Contact the NNLA coordinator (cibuzar@umn.edu) for a current list.


Ultra-thin transparent conducting oxides

AFM ImagesLimitations of ultra-thin transparent conducting oxides for integration into plasmonic-enhanced thin-film solar photovoltaic devices

Gwamuri, J., Vora, A., Khanal, R.R. et al. Mater Renew Sustain Energy (2015) 4: 12. doi:10.1007/s40243-015-0055-8

This study investigates ultra-thin transparent conducting oxides (TCO) of indium tin oxide (ITO), aluminum-doped zinc oxide (AZO) and zinc oxide (ZnO) to determine their viability as candidate materials for use in plasmonic-enhanced thin-film amorphous silicon solar photovoltaic (PV) devices.

Read more at Materials for Renewable and Sustainable Energy.


Welcome

M and M BuildingWelcome to the new microfabrication core facility website, it has been a long time coming and hopefully it will help answer most questions you have about the microfabrication core facilities capabilities, access, and policies. This website would have not been possible with out the hard work by Sue Hill.

If you would like a link posted to your personnel website or research group please let me know and I can have you added to the Networking section. This is not only to highlight our users, but to also allow for past, present, and future users to find collaborators at Michigan Technological University.