| Instrument | Status | Status Notes |
|---|---|---|
| 6″ Sputter deposition |  |
Air leak on the gate valve pneumatic cylinder
Cr – 100 W 10 nm/min Load: 3.49 Tune: 1.66 |
| 8″ Sputter deposition | |
Issues – Need to fix the hoist or take weight off the system |
| Denton e-beam deposition | |
|
| Fredrick e-beam deposition |  |
Cryo pump and compressor needs a rebuild |
| Parylene Coater | |
|
| TRION | |
Rough pump needs to be rebuild, but it is operational with the CAIBE rough pump which gives a better vacuum |
| CAIBE | |
Need to test with water cold stage and determine the beam current |
| March | |
Cleaning: 200 W, 100 sccm O2, 300 secs PDMS bonding: 40-50 W (maybe hard to get reflective power below 10 W), 100 sccm O2, 60 secs, after plasma treatment place the PDMS and glass together and heat treat at 80oC for 60 mins Stripping carbonized SU-8: 300 W, 100 sccm O2, 300 secs (may take longer, depending on thickness) |
| Ellipsometer | |
|
| FTIR | |
Issues – Calibration |
| Curvature System | |
Issues – Calibration |
| Oxidation Furnace | |
|
| Diffusion Furnace | |
|
| 2″ Furnace | |
|
| RTP | |
TC wafer needs replacing and spot welded onto the connectors |
| EasyNano CVD CNT | |
Issue: Need to replace the pressure switch in the gas cabinet as it is flaky |
| Dicing Saw | |
|
| EV620 Mask Aligner | |
Turning off the lamp to preserve the life timeIssues – Logging sometimes fails as the optics stage gets stuck, the y motor also losses firmware if system is off too long |
| Wet bench – Chemical processing | |
|
| Vacuum oven | |
|
| Hotplates | |
|
| Spinner | |
|
| Wire bonder | |
|
| Filmertics 3D Profiler | |
|
| Cleanroom Optical Microscopy | |
Issues – Calibrate the CCD capture measurements |
| Probe station | |
Issues – Need to install new probes from eBay |
| 4200A – SCS Parameter Analyzer | |
|
| Four point conductivity | |
|
| Atomic Layer Deposition | |
20190401 – New TDMAH installed and Hf deposition tuned to give a 4″ uniform deposition, growth rate is too fast per cycle, need to calibrate for the ALD region
20181205 – Milled a trench in the sleeve, put in the old ceramic pins, put in metal pins to stop the sleeve from moving 20181015 – Redo the N2 to be SS instead of plastic 201805023 – set up the process to represent an ALD valve that has constant Ar carrier flow 20180601 – Installed Ferrocene iron ALD source 20180814 – changed the precursor setup – Ferrocene is not producing a vapor pressure? 20190102 – Replaced the manual shut off valve on the ferrocene with an all metal valve – finally do not see F – not sure if it was the valve. Disconnected all the lines to the shower head that is not used. 20190219 – Installed the TDMAH to test uniformity and optimize the system |
| Big blue wet benches |  |
20181015 – Connected the 3-phase supply to the left side
Connected the aspirator, ran a new waste line to the current acid neutralization system. Need to install an automatic water shut off valve to the house water as the shut off requires a 10′ ladder to get to.
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