All posts by Sue Hill

Issues – Water flow meter is not indicating flow

20190511 – Installed a barrier to block water from getting to the wall instead of the drain

20180102 – Replaced the outlet water connectors as one had cracked and leaked water on the floor

20180406 – Replaced the pump oil and cleaned both the top and bottom seals on the chamber

20181014 – Replaced the O2 MFC as after 20 mins the flow would go to zero

Issues – Need to fix the hoist or take weight off the system

20190511 – Installed a barrier to block water from getting to the wall instead of the drain

Issues – Needs to be bead blasted

20190618 – Sent back the cryo compressor as it would not turn on

20190511 – Installed a barrier to block water from getting to the wall instead of the drain

20190418 – Cryo compressor rebuilt and reinstalled – system is functional

20181205 – Replaced the oil casing gasket as the rough pump was leaking oil

20180102 – Cryo Regenerated

Issues – Needs to be bead blasted, new multiple sample holder installed, and redo the water interlock and possibly all the interlocks

20190618 – Replaced the white sensing wire (no sure actually what it was) on the HV controller as it had melted in the sensing coil

20190511 – Installed a barrier to block water from getting to the wall instead of the drain

20171024 – Water lines replaced after one cracked, New Al crucible

20190219 – Topped up the Helium to 250 psi (when off) as the operation pressure was 80 psi, should be 105 psi

20190511 – Installed a barrier to block water from getting to the wall instead of the drain

Issues – Need to install an automatic water shut off

20190529 – Hole in the water line before the plastic to metal tubing connector in the RF system. Replaced all the water lines, flushed the RF loop as the 50% DIW / 50% Ethylene Glycol mixture was not flowing in the RF cooling loop. Opened both RF supplies and checked for coolant. Flushed the system twice and emptied the debris filter in the pump head.

20190517 – Oil case seal replaced to resolve an oil leak, oil filtered, motor in the chiller replaced with the motor from the original chiller as the shaft was unstable

20171127 – Replaced the oil after the pump run out, leak in a seal still

20180622 – Replaced the lid o-ring (#383) there was a leak rate of 1Torr/min

20190108 – Replaced the rough pump with the one from the MARCH – rough pump time of ~60 secs

20190108 – Oil filter was jammed with dried oil contamination – rebuilt with old pump head (need to bleed to get the filter to draw in oil)

20190219 – CAIBE rough pump is now used for the TRION until the 2021 C2 pump is rebuilt (FY20)

20180420 – Installed new stage, fixed the water line that melted, removed the load lock turbo from the cooling as it was blocked and not needed

20180601 – Installed a new microwave source

20181023 – Replaced the shaft seal on the rough pump

20190219 – Rough pump is being used by the TRION

Issues – need to modify the side to allow for the RF cable to penetrate the side

20180127 – Connected water lines to the RF base

20190108 – RF supply is reading a power when it is on and set to zero, rough pump is on the TRION, RF supply is also not tuning and has major RF swings.

20190219 – Put a new copper ground from the vacuum line to the water line in the chase, without the MARCH RF goes crazy

20190315 – Replacement RF supply received and in working order. C1 is not turning properly as the bearing is bad.

20190320 – Rebuilt C1 and moved the RF input to go directly to the variable capacitors. System is tuning properly from 0W to 300W.

Issues – None

20171024 – Light source realigned to give a lower gain of 2

Issues – Calibration

Issues – Calibration

Fall 2017 – Installed a water bubbler, but the lines are not sending the steam to the furnace correctly.

20180131 – Installed a new TC for zone 2, testing in the lab class

20180604 – Installed a new controller and the system seems stable

Issues – None

20190201 – Installed a quartz liner for MDE to anneal their SU-8 films

Issues – None

Issues – Need to make sure we have the proper cooling, system was run with glass samples and melted to the silicon TC and damaged it (2019 May)

Fall 2017 – Moved the water supply off the tape to the building supply, replaced a leaking water pressure switch

20180413 – Replaced the pressure flow switch but it is not fast enough or not sending the right signal that there is water in time.

20180601 – Replaced several of the boards after boards 6 and 7 were swapped as recommended by the company and this lead to several issues with burnt out leads and blown fuses

20180814 – Installed a 12VDC power supply that will need to be manually turned on to turn on the water, fix for the water pressure issues. The optics head was realigned as it became lose and users had been bumping it.

20180901 – Installed a Cole-Parmer Venturi Vacuum Pump, 3.2 cfm, 28.0″Hg

Issues – Logging sometimes fails as the optics stage gets stuck

20180814 – Fixed three air leaks, two on the right side of the stage as the tubes had cracked

Issues – Air leaks

Issues – None

20180131 – Installed a vacuum pump

Issues – None

Issues – None

Issues – None

Issues – Calibrate the CCD capture measurements, can use the SYP mask

20190219 – 100x objective repaired

Issues – probes need better bases

20180913 x-y belt replaced with a No slip positive drive belt RBC PIC DESIGN PART#F32BS18-112

Issues – Communication errors with the SMU, system needs to be rebuilt $30K

Issues – Need to automate

Issues – Need to automate

20190401 – New TDMAH installed and Hf deposition tuned to give a 4″ uniform deposition, growth rate is too fast per cycle, need to calibrate for the ALD region

20181205 – Milled a trench in the sleeve, put in the old ceramic pins, put in metal pins to stop the sleeve from moving

20181015 – Redo the N2 to be SS instead of plastic

201805023 – set up the process to represent an ALD valve that has constant Ar carrier flow

20180601 – Installed Ferrocene iron ALD source

20180814 – changed the precursor setup – Ferrocene is not producing a vapor pressure?

20190102 – Replaced the manual shut off valve on the ferrocene with an all metal valve – finally do not see F – not sure if it was the valve. Disconnected all the lines to the shower head that is not used.

20190219 – Installed the TDMAH to test uniformity and optimize the system

20171127 – 100x received and installed

20180814 – Had to realign the fringes with the focus point.

20181015 – Connected the 3-phase supply to the left side – Alarm 1 is coming on so it is not running yet.

Installed in January – April 2019 and fully operational – installation included HVAC, flammable gas cabinet (H2, C2H4), gas lines for Ar, N2, H2, C2H4, 3-phase power