| Instrument | Status | Status Notes |
|---|---|---|
| 6″ Sputter deposition |  |
Online
Issues – Water flow meter is not indicating flow 20180102 – Replaced the outlet water connectors as one had cracked and leaked water on the floor 20180406 – Replaced the pump oil and cleaned both the top and bottom seals on the chamber 20181014 – Replaced the O2 MFC as after 20 mins the flow would go to zero |
| 8″ Sputter deposition | |
Online
Issues – Need to fix the hoist or take weight off the system |
| Denton e-beam deposition |  |
Offline – Cryo compressor is being repaired
Issues – Cryo compressor is leaking oil, need to have rebuilt 20181205 – Replaced the oil casing gasket as the rough pump was leaking oil 20180102 – Cryo Regenerated |
| Fredrick e-beam deposition | |
Online
Issues – Needs to be bead blasted, install mirror to see the beam, and check the pump for a leak 20171024 – Water lines replaced after one cracked, New Al crucible 20190219 – Topped up the Helium to 250 psi (when off) as the operation pressure was 80 psi, should be 105 psi |
| Parylene Coater | |
Online |
| TRION |  |
Online – Need to rebuild pump or get a new shaft seal for the CAIBE after it ran dry.
20171127 – Replaced the oil after the pump run out, leak in a seal still 20180622 – Replaced the lid o-ring (#383) there was a leak rate of 1Torr/min 20190108 – Replaced the rough pump with the one from the MARCH – rough pump time of ~60 secs 20190108 – Oil filter was jammed with dried oil contamination – rebuilt with old pump head (need to bleed to get the filter to draw in oil) 20190219 – CAIBE rough pump is now used for the TRION until the 2021 C2 pump is rebuilt (FY20) |
| CAIBE | |
Offline
20180420 – Installed new stage, fixed the water line that melted, removed the load lock turbo from the cooling as it was blocked and not needed 20180601 – Installed a new microwave source 20181023 – Replaced the shaft seal on the rough pump 20190219 – Rough pump is being used by the TRION |
| March | |
Ready
Issues – need to modify the side to allow for the RF cable to penetrate the side 20180127 – Connected water lines to the RF base 20190108 – RF supply is reading a power when it is on and set to zero, rough pump is on the TRION, RF supply is also not tuning and has major RF swings. 20190219 – Put a new copper ground from the vacuum line to the water line in the chase, without the MARCH RF goes crazy 20190315 – Replacement RF supply received and in working order. C1 is not turning properly as the bearing is bad. 20190320 – Rebuilt C1 and moved the RF input to go directly to the variable capacitors. System is tuning properly from 0W to 300W. |
| Ellipsometer | |
Ready
Issues – None 20171024 – Light source realigned to give a lower gain of 2 |
| FTIR | |
Ready
Issues – Calibration |
| Curvature System | |
Ready
Issues – Calibration |
| Oxidation Furnace | |
Ready
Issues – Need to determine if the wet oxidation is working correctly Fall 2017 – Installed a water bubbler, but the lines are not sending the steam to the furnace correctly. 20180131 – Installed a new TC for zone 2, testing in the lab class 20180604 – Installed a new controller and the system seems stable |
| Diffusion Furnace | |
Ready
Issues – None 20190201 – Installed a quartz liner for MDE to anneal their SU-8 films |
| 2″ Furnace | |
Ready
Issues – None |
| RTP | |
Chiller is leaking water if run at too higher pressure
Issues – Need to make sure we have the proper cooling |
| Dicing Saw | |
Ready
Fall 2017 – Moved the water supply off the tape to the building supply, replaced a leaking water pressure switch 20180413 – Replaced the pressure flow switch but it is not fast enough or not sending the right signal that there is water in time. 20180601 – Replaced several of the boards after boards 6 and 7 were swapped as recommended by the company and this lead to several issues with burnt out leads and blown fuses 20180814 – Installed a 12VDC power supply that will need to be manually turned on to turn on the water, fix for the water pressure issues. The optics head was realigned as it became lose and users had been bumping it. 20180901 – Installed a Cole-Parmer Venturi Vacuum Pump, 3.2 cfm, 28.0″Hg |
| EVG 620 Mask Aligner | |
Ready – Turning off the lamp to preserve the life time
Issues – Logging sometimes fails as the optics stage gets stuck 20180814 – Fixed three air leaks, two on the right side of the stage as the tubes had cracked |
| Wet bench – Chemical processing | |
Ready
Issues – Air leaks |
| Vacuum oven | |
Ready
Issues – None 20180131 – Installed a vacuum pump |
| Hotplates | |
Ready
Issues – None |
| Spinner | |
Ready
Issues – None |
| Wire bonder | |
Ready
Issues – None |
| Cleanroom Optical Microscopy | |
Ready
Issues – Calibrate the CCD capture measurements, can use the SYP mask 20190219 – 100x objective repaired |
| Probe station | |
Ready
Issues – probes need better bases 20180913 x-y belt replaced with a No slip positive drive belt RBC PIC DESIGN PART#F32BS18-112 |
| Parameter Analyzer | |
Offline
Issues – Communication errors with the SMU, system needs to be rebuilt $30K |
| Capacitance Voltage Measurement | |
Ready
Issues – Need to automate |
| Four point conductivity | |
Ready
Issues – Need to automate |
| Atomic Layer Deposition | |
Ready
20181205 – Milled a trench in the sleeve, put in the old ceramic pins, put in metal pins to stop the sleeve from moving 20181015 – Redo the N2 to be SS instead of plastic 201805023 – set up the process to represent an ALD valve that has constant Ar carrier flow 20180601 – Installed Ferrocene iron ALD source 20180814 – changed the precursor setup – Ferrocene is not producing a vapor pressure? 20190102 – Replaced the manual shut off valve on the ferrocene with an all metal valve – finally do not see F – not sure if it was the valve. Disconnected all the lines to the shower head that is not used. 20190219 – Installed the TDMAH to test uniformity and optimize the system |
| Filmertics 3D Profiler | |
Ready
20171127 – 100x received and installed 20180814 – Had to realign the fringes with the focus point. |
| Big blue wet benches | |
20180814
20181015 – Connected the 3-phase supply to the left side – Alarm 1 is coming on so it is not running yet. 1 – I put in a new controller for the right bench and it allows for the bench to be used. The old controller might be ok, but I did not realize you had to power cycle the bench with the main breaker if the EPO is pressed. There is still an alarm going and I am not sure yet what is causing it.
2 – I started checking the controls to see if everything works – did not get very far, but there is running DIW and N2
3 – The aspirators are not working and this is very much likely because Bill has decided to run these to the new acid waste storage tank instead of the current one. To finish the new tank will take significant time and funds to get operational and with the current usage I do not see the point. I might be able to tee into the current tank, however I am not sure what has been done to turn off the aspirators.
4 – The left bath seems to have no power, but the breaks are not labelled to know where the power is going – luckily for me there is only one break currently off – however it did not turn on the left controller for the bench.
5 – The left bench is not connected at all for waste and this will mean breaking the lines on the 3rd floor to install tees and then running tubes up to the 4th floor to be connected.
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