Sue Hill – Microfabrication Facility

Instrument	Status	Status Notes
6″ Sputter deposition
8″ Sputter deposition		Issues – Need to fix the hoist or take weight off the system
Denton e-beam deposition		Issues – Cryo compressor had a Helium leak and is being rebuilt
Fredrick e-beam deposition
Parylene Coater
TRION
CAIBE
March
Ellipsometer
FTIR		Issues – Calibration
Curvature System		Issues – Calibration
Oxidation Furnace
Diffusion Furnace
2″ Furnace
RTP		Issues – Need to make sure we have the proper cooling, chiller is leaking water if run at too higher pressure
EasyNano CVD CNT
Dicing Saw
EV620 Mask Aligner		Turning off the lamp to preserve the life timeIssues – Logging sometimes fails as the optics stage gets stuck
Wet bench – Chemical processing
Vacuum oven
Hotplates
Spinner
Wire bonder
Filmertics 3D Profiler
Cleanroom Optical Microscopy		Issues – Calibrate the CCD capture measurements
Probe station		Issues – probes need better bases
4200A – SCS Parameter Analyzer
Four point conductivity
Atomic Layer Deposition		Ready20190401 – New TDMAH installed and Hf deposition tuned to give a 4″ uniform deposition, growth rate is too fast per cycle, need to calibrate for the ALD region 20181205 – Milled a trench in the sleeve, put in the old ceramic pins, put in metal pins to stop the sleeve from moving 20181015 – Redo the N2 to be SS instead of plastic 201805023 – set up the process to represent an ALD valve that has constant Ar carrier flow 20180601 – Installed Ferrocene iron ALD source 20180814 – changed the precursor setup – Ferrocene is not producing a vapor pressure? 20190102 – Replaced the manual shut off valve on the ferrocene with an all metal valve – finally do not see F – not sure if it was the valve. Disconnected all the lines to the shower head that is not used. 20190219 – Installed the TDMAH to test uniformity and optimize the system
Big blue wet benches		Ready20181015 – Connected the 3-phase supply to the left side – Alarm 1 is coming on so it is not running yet. Connected the aspirator, ran a new waste line to the current acid neutralization system. Need to install an automatic water shut off valve to the house water as the shut off requires a 10′ ladder to get to. 1 – I put in a new controller for the right bench and it allows for the bench to be used. The old controller might be ok, but I did not realize you had to power cycle the bench with the main breaker if the EPO is pressed. There is still an alarm going and I am not sure yet what is causing it. 2 – I started checking the controls to see if everything works – did not get very far, but there is running DIW and N2 3 – The aspirators are not working and this is very much likely because Bill has decided to run these to the new acid waste storage tank instead of the current one. To finish the new tank will take significant time and funds to get operational and with the current usage I do not see the point. I might be able to tee into the current tank, however I am not sure what has been done to turn off the aspirators. 4 – The left bath seems to have no power, but the breaks are not labelled to know where the power is going – luckily for me there is only one break currently off – however it did not turn on the left controller for the bench. 5 – The left bench is not connected at all for waste and this will mean breaking the lines on the 3rd floor to install tees and then running tubes up to the 4th floor to be connected.