All posts by Sue Hill

Instrument	Status	Status Notes
6″ Sputter deposition		Online Issues – Water flow meter is not indicating flow 20180102 – Replaced the outlet water connectors as one had cracked and leaked water on the floor 20180406 – Replaced the pump oil and cleaned both the top and bottom seals on the chamber 20181014 – Replaced the O2 MFC as after 20 mins the flow would go to zero
8″ Sputter deposition		Online Issues – Need to fix the hoist or take weight off the system
Denton e-beam deposition		Offline Issues – Cryo compressor is leaking oil, need to have rebuilt 20181205 – Replaced the oil casing gasket as the rough pump was leaking oil 20180102 – Cryo Regenerated
Fredrick e-beam deposition		Online Issues – Needs to be bead blasted, install mirror to see the beam, and check the pump for a leak 20171024 – Water lines replaced after one cracked, New Al crucible
Parylene Coater		Ready Issues – Needs to be added to e-logger
TRION		Online 20171127 – Replaced the oil after the pump run out, leak in a seal still 20180622 – Replaced the lid o-ring (#383) there was a leak rate of 1Torr/min 20190108 – Replaced the rough pump with the one from the MARCH – rough pump time of ~60 secs 20190108 – Oil filter was jammed with dried oil contamination – rebuilt with old pump head (need to bleed to get the filter to draw in oil)
CAIBE		Online 20180420 – Installed new stage, fixed the water line that melted, removed the load lock turbo from the cooling as it was blocked and not needed 20180601 – Installed a new microwave source 20181023 – Replaced the shaft seal on the rough pump
March		OFFLINE – RFX-600 needs to be repaired and 2021 C2 rough pump rebuilt, system is not ideal for low power processing to active PDMS Issues – Cross talk between the tuner and MFC boxes, the RF supply randomly turns off, RF does not tune properly at low power. 20180127 – Connected water lines to the RF base 20190108 – RF supply is reading a power when it is on and set to zero, rough pump is on the TRION, RF supply is also not tuning and has major RF swings.
Ellipsometer		Ready Issues – None 20171024 – Light source realigned to give a lower gain of 2
FTIR		Ready Issues – Calibration
Curvature System		Ready Issues – Calibration
Oxidation Furnace		Ready Issues – Need to determine if the wet oxidation is working correctly Fall 2017 – Installed a water bubbler, but the lines are not sending the steam to the furnace correctly. 20180131 – Installed a new TC for zone 2, testing in the lab class 20180604 – Installed a new controller and the system seems stable
Diffusion Furnace		Ready Issues – None
2″ Furnace		Ready Issues – None
RTP		Chiller is leaking water if run at too higher pressure Issues – Need to make sure we have the proper cooling
Dicing Saw		Ready Fall 2017 – Moved the water supply off the tape to the building supply, replaced a leaking water pressure switch 20180413 – Replaced the pressure flow switch but it is not fast enough or not sending the right signal that there is water in time. 20180601 – Replaced several of the boards after boards 6 and 7 were swapped as recommended by the company and this lead to several issues with burnt out leads and blown fuses 20180814 – Installed a 12VDC power supply that will need to be manually turned on to turn on the water, fix for the water pressure issues. The optics head was realigned as it became lose and users had been bumping it. 20180901 – Installed a Cole-Parmer Venturi Vacuum Pump, 3.2 cfm, 28.0″Hg
EVG 620 Mask Aligner		Ready – Turning off the lamp to preserve the life time Issues – Logging sometimes fails as the optics stage gets stuck 20180814 – Fixed three air leaks, two on the right side of the stage as the tubes had cracked
Wet bench – Chemical processing		Ready Issues – Air leaks
Vacuum oven		Ready Issues – None 20180131 – Installed a vacuum pump
Hotplates		Ready Issues – None
Spinner		Ready Issues – None
Wire bonder		Ready Issues – None
Cleanroom Optical Microscopy		Ready Issues – Calibrate the CCD capture measurements, can use the SYP mask
Probe station		Ready Issues – 20180913 x-y belt replaced with a No slip positive drive belt RBC PIC DESIGN PART#F32BS18-112
Parameter Analyzer		Ready Issues – See above
Capacitance Voltage Measurement		Ready Issues – Need to automate
Four point conductivity		Ready Issues – Need to automate
Atomic Layer Deposition		Issues – crashed the stage and now need to replace the motor driver. 20181205 – Milled a trench in the sleeve, put in the old ceramic pins, put in metal pins to stop the sleeve from moving 20181015 – Redo the N2 to be SS instead of plastic 201805023 – set up the process to represent an ALD valve that has constant Ar carrier flow 20180601 – Installed Ferrocene iron ALD source 20180814 – changed the precursor setup – Ferrocene is not producing a vapor pressure? 20190102 – Replaced the manual shut off valve on the ferrocene with an all metal valve – finally do not see F – not sure if it was the valve. Disconnected all the lines to the shower head that is not used.
Filmertics 3D Profiler		Ready for training and usage 20171127 – 100x received and installed 20180814 – Had to realign the fringes with the focus point.
Big blue wet benches		20180814 20181015 – Connected the 3-phase supply to the left side – Alarm 1 is coming on so it is not running yet. 1 – I put in a new controller for the right bench and it allows for the bench to be used. The old controller might be ok, but I did not realize you had to power cycle the bench with the main breaker if the EPO is pressed. There is still an alarm going and I am not sure yet what is causing it. 2 – I started checking the controls to see if everything works – did not get very far, but there is running DIW and N2 3 – The aspirators are not working and this is very much likely because Bill has decided to run these to the new acid waste storage tank instead of the current one. To finish the new tank will take significant time and funds to get operational and with the current usage I do not see the point. I might be able to tee into the current tank, however I am not sure what has been done to turn off the aspirators. 4 – The left bath seems to have no power, but the breaks are not labelled to know where the power is going – luckily for me there is only one break currently off – however it did not turn on the left controller for the bench. 5 – The left bench is not connected at all for waste and this will mean breaking the lines on the 3rd floor to install tees and then running tubes up to the 4th floor to be connected.

MFF Equipment Status

Ultra-thin transparent conducting oxides

Limitations of ultra-thin transparent conducting oxides for integration into plasmonic-enhanced thin-film solar photovoltaic devices