Category Archives: Status

MFF Equipment Status

Instrument Status Status Notes
6″ Sputter deposition  Ready Online

Issues – Water flow meter is not indicating flow and ion gauge is not believable

20180102 – Replaced the outlet water connectors as one had cracked and leaked water on the floor

20180406 – Replaced the pump oil and cleaned both the top and bottom seals on the chamber

8″ Sputter deposition Ready Online

Issues – Need to fix the hoist or take weight off the system

Denton e-beam deposition  Ready Online

Issues – None

20180102 – Cryo Regenerated

Fredrick e-beam deposition  Ready Online

Issues – Needs to be bead blasted, install mirror to see the beam, and check the pump for a leak

20171024 – Water lines replaced after one cracked, New Al crucible

Parylene Coater  Ready Ready

Issues – Needs to be added to e-logger

TRION  Ready Online

Issues – Reduced O2 flow for clean recipe as the throttle valve and can not control the flow, and random pressure issues

20171127 – Replaced the oil after the pump run out, leak in a seal still

20180622 – Replaced the lid o-ring (#383) there was a leak rate of 1Torr/min

CAIBE  Ready Online

20180420 – Installed new stage, fixed the water line that melted, removed the load lock turbo from the cooling as it was blocked and not needed

20180601 – Installed a new microwave source

March  Useable Online

Issues – Cross talk between the tuner and MFC boxes, need to try and have an external PSU

20180127 – Connected water lines to the RF base

Ellipsometer  Ready Ready

Issues – None

20171024 – Light source realigned to give a lower gain of 2

FTIR  Ready Ready

Issues – Calibration

Curvature System  Ready Ready

Issues – Calibration

Oxidation Furnace  Ready Ready

Issues – Need to determine if the wet oxidation is working correctly

Fall 2017 – Installed a water bubbler, but the lines are not sending the steam to the furnace correctly.

20180131 – Installed a new TC for zone 2, testing in the lab class

20180604 – Installed a new controller and the system seems stable

Diffusion Furnace  Ready Ready

Issues – None

2″ Furnace  Ready Ready

Issues – None

RTP  Useable Chiller is leaking water if run at too higher pressure

Issues – Need to make sure we have the proper cooling

Dicing Saw  Useable Issues – Need to build an new pump mount and there has been water flow issues, there is an issue with the camera – it is loss and effects alignment.

Fall 2017 – Moved the water supply off the tape to the building supply, replaced a leaking water pressure switch

20180413 – Replaced the pressure flow switch but it is not fast enough or not sending the right signal that there is water in time.

20180601 – Replaced several of the boards after boards 6 and 7 were swapped as recommended by the company and this lead to several issues with burnt out leads and blown fuses

EVG 620 Mask Aligner  Ready Ready – Turning off the lamp to preserve the life time

Issues – Logging sometimes fails as the optics stage gets stuck

Wet bench – Chemical processing  Ready Ready

Issues

Vacuum oven  Ready Ready

Issues – None

20180131 – Installed a vacuum pump

Hotplates  Ready Ready

Issues – None

Spinner  Ready Ready

Issues – None

Wire bonder  Ready Ready

Issues – None

Cleanroom Optical Microscopy  Ready Ready

Issues – Calibrate the CCD capture measurements, can use the SYP mask

Probe station  Ready Ready

Issues – Need to replace the y-axis belt

Parameter Analyzer  Ready Ready

Issues – See above

Capacitance Voltage Measurement  Ready Ready

Issues – Need to automate

Four point conductivity  Ready Ready

Issues – Need to automate

Atomic Layer Deposition Useable Waiting on new heat pads to heat the top and shower head of the ALD to reduce clogging.

Issues – Need to buy a new TDMAH source

201805023 – set up the process to represent an ALD valve that has constant Ar carrier flow

20180601 – Installed Ferrocene iron ALD source

Filmertics 3D Profiler Ready Ready for training and usage

20171127 – 100x received and installed