Category Archives: Status

MFF Equipment Status

Instrument Status Status Notes
6″ Sputter deposition  Ready Online

Issues – Water flow meter is not indicating flow

20180102 – Replaced the outlet water connectors as one had cracked and leaked water on the floor

20180406 – Replaced the pump oil and cleaned both the top and bottom seals on the chamber

20181014 – Replaced the O2 MFC as after 20 mins the flow would go to zero

8″ Sputter deposition Ready Online

Issues – Need to fix the hoist or take weight off the system

Denton e-beam deposition  Ready Online

Issues – None

20180102 – Cryo Regenerated

Fredrick e-beam deposition  Ready Online

Issues – Needs to be bead blasted, install mirror to see the beam, and check the pump for a leak

20171024 – Water lines replaced after one cracked, New Al crucible

Parylene Coater  Ready Ready

Issues – Needs to be added to e-logger

TRION  Ready Online

Issues – Reduced O2 flow for clean recipe as the throttle valve and can not control the flow, need to replace the rough pump

20171127 – Replaced the oil after the pump run out, leak in a seal still

20180622 – Replaced the lid o-ring (#383) there was a leak rate of 1Torr/min

CAIBE  Ready Online

20180420 – Installed new stage, fixed the water line that melted, removed the load lock turbo from the cooling as it was blocked and not needed

20180601 – Installed a new microwave source

20181023 – Replaced the shaft seal on the rough pump

March  Useable Online

Issues – Cross talk between the tuner and MFC boxes, need to try and have an external PSU, the RF supply randomly turns off

20180127 – Connected water lines to the RF base

Ellipsometer  Ready Ready

Issues – None

20171024 – Light source realigned to give a lower gain of 2

FTIR  Ready Ready

Issues – Calibration

Curvature System  Ready Ready

Issues – Calibration

Oxidation Furnace  Ready Ready

Issues – Need to determine if the wet oxidation is working correctly

Fall 2017 – Installed a water bubbler, but the lines are not sending the steam to the furnace correctly.

20180131 – Installed a new TC for zone 2, testing in the lab class

20180604 – Installed a new controller and the system seems stable

Diffusion Furnace  Ready Ready

Issues – None

2″ Furnace  Ready Ready

Issues – None

RTP  Useable Chiller is leaking water if run at too higher pressure

Issues – Need to make sure we have the proper cooling

Dicing Saw  Ready Ready

Fall 2017 – Moved the water supply off the tape to the building supply, replaced a leaking water pressure switch

20180413 – Replaced the pressure flow switch but it is not fast enough or not sending the right signal that there is water in time.

20180601 – Replaced several of the boards after boards 6 and 7 were swapped as recommended by the company and this lead to several issues with burnt out leads and blown fuses

20180814 – Installed a 12VDC power supply that will need to be manually turned on to turn on the water, fix for the water pressure issues. The optics head was realigned as it became lose and users had been bumping it.

20180901 – Installed a Cole-Parmer Venturi Vacuum Pump, 3.2 cfm, 28.0″Hg

EVG 620 Mask Aligner  Ready Ready – Turning off the lamp to preserve the life time

Issues – Logging sometimes fails as the optics stage gets stuck

20180814 – Fixed three air leaks, two on the right side of the stage as the tubes had cracked

Wet bench – Chemical processing  Ready Ready

Issues – Air leaks

Vacuum oven  Ready Ready

Issues – None

20180131 – Installed a vacuum pump

Hotplates  Ready Ready

Issues – None

Spinner  Ready Ready

Issues – None

Wire bonder  Ready Ready

Issues – None

Cleanroom Optical Microscopy  Ready Ready

Issues – Calibrate the CCD capture measurements, can use the SYP mask

Probe station  Ready Ready

Issues – 20180913 x-y belt replaced with a No slip positive drive belt RBC PIC DESIGN PART#F32BS18-112

Parameter Analyzer  Ready Ready

Issues – See above

Capacitance Voltage Measurement  Ready Ready

Issues – Need to automate

Four point conductivity  Ready Ready

Issues – Need to automate

Atomic Layer Deposition Useable Need to install N2 on the precusor and check it is pulsing properly and then install TDMAH.

20181015 – Redo the N2 to be SS instead of plastic

201805023 – set up the process to represent an ALD valve that has constant Ar carrier flow

20180601 – Installed Ferrocene iron ALD source

20180814 – changed the precursor setup – Ferrocene is not producing a vapor pressure?

Filmertics 3D Profiler Ready Ready for training and usage

20171127 – 100x received and installed

20180814 – Had to realign the fringes with the focus point.

Big blue wet benches Useable  20180814

20181015 – Connected the 3-phase supply to the left side – Alarm 1 is coming on so it is not running yet.

1 – I put in a new controller for the right bench and it allows for the bench to be used. The old controller might be ok, but I did not realize you had to power cycle the bench with the main breaker if the EPO is pressed. There is still an alarm going and I am not sure yet what is causing it.
2 – I started checking the controls to see if everything works – did not get very far, but there is running DIW and N2
3 – The aspirators are not working and this is very much likely because Bill has decided to run these to the new acid waste storage tank instead of the current one. To finish the new tank will take significant time and funds to get operational and with the current usage I do not see the point. I might be able to tee into the current tank, however I am not sure what has been done to turn off the aspirators.
4 – The left bath seems to have no power, but the breaks are not labelled to know where the power is going – luckily for me there is only one break currently off – however it did not turn on the left controller for the bench.
5 – The left bench is not connected at all for waste and this will mean breaking the lines on the 3rd floor to install tees and then running tubes up to the 4th floor to be connected.