Category: Hitachi S-4700 FE-SEM

FE-SEM in Electron Optics

FESEM is down

The intermittent vacuum display problem reappeared this morning. The manufacturer has given me a few tests to make. I’ll do that and report the information. Hopefully we will isolate the problem and make a repair. I will restart the system which in the past worked for a period of time. I’ll restart the system and it should be ready to operate by 1pm today.

FESEM back online

The FESEM is back online this morning. The vacuum has recovered.

This problem – the vacuum panel shutting off – has occurred a few times but it comes back on. It is hard for the service engineer to repair the problem when it comes back and works fine.

So, the scope is online and ready to use.