Category: Hitachi S-4700 FE-SEM

FE-SEM in Electron Optics

Hitachi FESEM – Maintenance done – good practice

Hi FESEM users,

The Hitachi service engineer did the year’s maintenance on the FESEM this past Monday and Tuesday 5/20 and 5/21.

1) He fixed the spring on the stage where we slid the specimen mount in. It was loose and that was causing some vibration. We should not see less jiggling images at higher magnification.

2) He did the full column alignment. From now on, use the software only when you do the alignments. Do not change the physical knobs of the apertures.

3) The beam monitor aperture is set at position 2, and should be kept at 2 !!!

4) If you ever need to change the objective aperture, only use the knob to switch between apertures 1, 3, or 4. Do not use aperture 2.

Objective aperture sizes: 1 > 3 = 2 > 4

Attn.: Objective apertures 2 and 3 have the same size. We exchange them annually when one or the other gets dirty. This year we are using 3.

Remember: Home stage position is: X=Y=Z=12.5 mm, Tilt = 0, Rotation = 0

Please, let me know if you still experience any problems.

Erico Freitas

ATTN FESEM Users – Computer Virus

February 12, 2024

Update on the FESEM, 

  • The microscope now has a clean version of the operating system.
  • This week, MTU IT will be setting up a system to allow for retrieval of the data.

As of today, do NOT put any USB into the FESEM.

February 5, 2024

Just an update. Unfortunately the FESEM is still down. We need to rebuild the hard drive for this computer. HITACHI will be on campus this week to resolve the issue. 

January 26, 2024

All FESEM users need to be aware that there was a virus on the FESM that had been transmitted by the USB drive. HITACHI was on campus this week and confirmed the infection. We are working to get a clean harddrive in the instrument. Until then the FESEM will be unavailable.

Additionally, anyone who has used the USB to transfer files may have malware on their USB and computer. Please work with MTU IT if you have any concerns.

Once the FESEM is back online we will be establishing a new protocol for transferring files. More information will be available soon.


July 14, 2023, 11:14 a.m.

Unfortunately the service engineer couldn’t complete the repairs this week and will be returning next week.

July 12, 2023, 2:35 p.m.

Hitachi will be on site tomorrow to repair the issue. We hope to have the FESEM back online soon.

July 12, 2023, 10:50 a.m.

The FESEM has a vacuum issue and won’t be available for use until we can repair this. I have calls out to our service engineers and hope to know more soon.